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Electrical Engineering


Electrical Engineering Course Objectives

For ELEC 420/820: Plasma Processing of Semiconductors


For the students to:

  • understand and be able to apply basic ideas of charged particle transport in low pressure plasmas.
  • understand and be able to apply basic ideas of atomic and molecular collisions in low pressure plasmas.
  • understand and able to apply basic ideas of chemical reactions and kinetics as they apply to low pressure plasmas.
  • understand the basic phenomena in low pressure D.C. and R.F. plasmas.
  • learn the characteristics of the common processing discharge types: capacitive, inductive, and wave-heated.
  • learn the basic processing issues behind etching of silicon.