Micro-Electro-Mechanical Systems (MEMS) have been gaining a lot of interest in the recent years due to their cheap manufacturing costs, mass-producibility, low weight and power consumption, and their very high accuracy.
Our lab is set to study Micro-oscillator-type MEMS devices and use their unique features to create new ways of sensing and as a computing unit.
Our lab is located in PKI 117B. It is equipped with a state-of-the-art holographic MEMS analyzer to study the static and dynamic response of our MEMS devices. The MEMS analyzer is also equipped with a stroboscope to offer a broad range of oscillation frequencies and input voltage
The MEMS analyzer, shown in the figure aside, measures the oscillation of a micro-beam, either in a horizontal or a vertical plane. To achieve higher oscillation magnitude, the microbeam is enclosed in a vacuum chamber.
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