MEMS - Resources


Our lab boasts a state-of-the-art digital holographic microscope (DHM), which can detect in-plane deflections up to 0.1 um and out of plane deflection in order of fractions of nanometers. Our lab also contains a high percision stroboscopic module for synchronization and accurate control of MEMS resonators

Fig.1: Lyncee Tec's DHM for MEMS characterization and deflection measurement

Fig.2: Stroboscopic module along with various measurement and characterization devices